The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2006
Filed:
Oct. 11, 2005
Adam Weiss, Pickering, CA;
Afsar Saranli, Toronto, CA;
Eduardo Ghelman, Etobicoke, CA;
David Baldwin, Atascadero, CA (US);
Adam Weiss, Pickering, CA;
Afsar Saranli, Toronto, CA;
Eduardo Ghelman, Etobicoke, CA;
David Baldwin, Atascadero, CA (US);
Photon Dynamics, Inc., San Jose, CA (US);
Abstract
A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held by a vacuum contact is transported on air cushions from the up-web air table to the central inspection/repair section. Vacuum nozzles integrated with porous medium pads precisely control the height of the flexible media above the central section during inspection or repair. Embodiments includes structures in which the media is either stationary or moving during inspection/repair. A first media can be loaded/unloaded while a second media is undergoing inspection or repair in a pipelined operational mode.