The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Sep. 08, 2000
Tomoko Ohtsuki, Allentown, PA (US);
Tomoko Ohtsuki, Allentown, PA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A laser device which can be used as a light source for an exposure device, can be downsized, and is easy to maintain. A laser beam (LB) emitted from a DFB (Distributed feedback) semiconductor laser, for example, and amplified by an optical fiber amplifier is passed through non-linear optical crystals () to be sequentially doubled in frequency to thereby generate an ultraviolet-region laser beam (LB) consisting of an octuple wave. A GdYCOB, that is, GdYCaO(BO)crystal (0≦×≦1) is used for the non-linear optical crystal () for a double wave-to-quadruple wave conversion, and a KAB, that is, KAlBOcrystal for the non-linear optical crystal () for a quadruple wave-to-octuple wave conversion. The non-linear optical crystals () are all fine-tuned in phase match angle by temperature controllers () respectively.