The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Aug. 08, 2003
Applicant:
Ryuichi Ebinuma, Tokyo, JP;
Inventor:
Ryuichi Ebinuma, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a supporting structure for supporting an optical element in an optical system, particularly for use in a semiconductor exposure apparatus. The supporting structure includes a first holding member having at least two supporting portions for supporting a peripheral portion of the optical system, and a second holding member for supporting the optical element, wherein the second holding member is connected to the first holding member, between the at least two supporting portions of the first holding member, through an elastic member.