The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Jan. 20, 2004
Applicants:
Edward G. Sergoyan, Mill Creek, WA (US);
Corbin Champion, Meridian, ID (US);
Robert G. Olsen, Pullman, WA (US);
Inventors:
Edward G. Sergoyan, Mill Creek, WA (US);
Corbin Champion, Meridian, ID (US);
Robert G. Olsen, Pullman, WA (US);
Assignee:
The Boeing Company, Chicago, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 27/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Film thickness measurement systems and methods are provided that utilize a signal generator having a Gunnplexer design and a resonant frequency detector to correlate the shift in resonant frequency experienced by a resonant cavity having one face abutting a test object. The shift is resonant frequency is determinative of a linear or near linear correlation between film thickness and the resonant frequency shift.