The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
May. 19, 2003
Akira Kamabuchi, Ashiya, JP;
Yasunori Uetani, Tsukuba, JP;
Hiroshi Moriuma, Toyonaka, JP;
Sumitomo Chemical Company, Limited, Osaka, JP;
Abstract
The present invention provides a sulfonate of the formula (I'): wherein Q, Q, Q, Qand Qeach independently represent hydrogen, alkyl having 1 to 16 carbon atoms, alkoxy having 1 to 16 carbon atoms, or electron attractive group, with the proviso that at least one of Q, Q, Q, Qand Qrepresents alkyl having 3 to 16 carbon atoms or alkoxy having 3 to 16 carbon atoms, and at least one of Q, Q, Q, Qand Qis electron attractive group; and The present invention also provides a chemical amplification type positive resist composition comprising a sulfonate of the formula (I) wherein Arepresents counter ion, and Q, Q, Q, Qand Qare as defined above; and