The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7135121 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 14, 2006

Filed:

Jan. 12, 2004
Applicants:

Akira Matsuzawa, Nagano-ken, JP;

Masato Shimada, Nagano-ken, JP;

Tetsushi Takahashi, Nagano-ken, JP;

Inventors:

Akira Matsuzawa, Nagano-ken, JP;

Masato Shimada, Nagano-ken, JP;

Tetsushi Takahashi, Nagano-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/04 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A manufacturing method of an ink-jet recording head for improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof. The manufacturing method includes the steps of: forming a passage-forming layer on a passage-forming substrate and imparting etching selectivity to a region that will be a space portion of the passage-forming layer; forming a vibration plate on the passage-forming layer and a piezoelectric element; performing anisotropic etching on the passage-forming substrate to form a penetrated portion at least to a region that will be the space portion, etching the passage-forming layer to form the space portion, and forming a pressure generating chamber opposite the space portion; and joining a nozzle plate to the passage-forming substrate.


Find Patent Forward Citations

Matsuzawa, Akira. (2006). Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus (U.S. Patent No. 7135121). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7135121

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