The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Apr. 13, 2000
Wolfgang Schmutz, Zimmern, DE;
Joseph Gentischer, Remshalden, DE;
Wolfgang Schmutz, Zimmern, DE;
Joseph Gentischer, Remshalden, DE;
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A device () for handling substrates () inside and outside a clean room () is provided with a locking transfer device (), by which means a substrate cassette () that is accommodated in a box () in clean-room conditions can be removed from or placed in said box (); and with a first handling device (), by which means the substrates () can be placed in or removed from the cassette (). According to the invention, a storage area () for a plurality of cassette boxes () is positioned on or above the clean room () and the locking transfer device () is provided between the storage area () and the clean room (), so that various work and production steps can be combined in such a way as to save space.