The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Jan. 09, 2006
Rainer Willig, Tamm, DE;
Andreas Thomae, Stuttgart, DE;
Burkhard Kuhlmann, Eningen, DE;
Joerg Hauer, Reutlingen, DE;
Udo-martin Gomez, Leonberg, DE;
Siegbert Goetz, Gerlingen, DE;
Christian Doering, Stuttgart, DE;
Michael Fehrenbach, Mittelstadt, DE;
Wolfram Bauer, Tuebingen, DE;
Udo Bischof, Wannweil, DE;
Reinhard Neul, Stuttgart, DE;
Karsten Funk, Palo Alto, CA (US);
Markus Lutz, Palo Alto, CA (US);
Gerhard Wucher, Reutlingen, DE;
Jochen Franz, Reutlingen, DE;
Rainer Willig, Tamm, DE;
Andreas Thomae, Stuttgart, DE;
Burkhard Kuhlmann, Eningen, DE;
Joerg Hauer, Reutlingen, DE;
Udo-Martin Gomez, Leonberg, DE;
Siegbert Goetz, Gerlingen, DE;
Christian Doering, Stuttgart, DE;
Michael Fehrenbach, Mittelstadt, DE;
Wolfram Bauer, Tuebingen, DE;
Udo Bischof, Wannweil, DE;
Reinhard Neul, Stuttgart, DE;
Karsten Funk, Palo Alto, CA (US);
Markus Lutz, Palo Alto, CA (US);
Gerhard Wucher, Reutlingen, DE;
Jochen Franz, Reutlingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.