The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2006
Filed:
Dec. 15, 2003
Ken A. Nishimura, Fremont, CA (US);
Dale W. Schroeder, Scotts Valley, CA (US);
Charles D. Hoke, Menlo Park, CA (US);
Ken A. Nishimura, Fremont, CA (US);
Dale W. Schroeder, Scotts Valley, CA (US);
Charles D. Hoke, Menlo Park, CA (US);
Agilent Technologies, Inc., Santa Clara, CA (US);
Abstract
A spatial light modulator for use in a photolithography system includes light modulation elements configured to photolithographically transfer an image onto a substrate using an optical oversampling technique to reduce defects in the transferred image. A first set of the light modulation elements is operable to photolithographically transfer a portion of the image onto an area of a substrate, and a second set of the light modulation elements is operable to photolithographically transfer the portion of the image onto the area of the substrate. The spatial light modulator further includes memory elements in communication with respective light modulation elements for storing data representing the portion of the image.