The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 2006

Filed:

Jul. 30, 2004
Applicants:

Paul E. Fischione, Export, PA (US);

David W. Smith, Oakmont, PA (US);

Michael R. Scheinfein, Portland, OR (US);

Joseph M. Matesa, Murrysville, PA (US);

Thomas C. Swihart, Pittsburgh, PA (US);

David Martin, Dunbar, PA (US);

Inventors:

Paul E. Fischione, Export, PA (US);

David W. Smith, Oakmont, PA (US);

Michael R. Scheinfein, Portland, OR (US);

Joseph M. Matesa, Murrysville, PA (US);

Thomas C. Swihart, Pittsburgh, PA (US);

David Martin, Dunbar, PA (US);

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A milling device is disclosed for the preparation of microscopy specimens or other surface science applications through the use of ion bombardment. The device provides the ability to utilize both gross and fine modification of the specimen surface through the use of high and low energy ion sources. Precise control of the location of the specimen within the impingement beams created by the ion sources provides the ability to tilt and rotate the specimen with respect thereto. Locational control also permits the translocation of the specimen between the various sources under programmatic control and under consistent vacuum conditions. A load lock mechanism is also provided to permit the introduction of specimens into the device without loss of vacuum and with the ability to return the specimen to ambient temperature during such load and unload operation. The specimen may be observed and imaged during all active phases of operation.


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