The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2006
Filed:
Feb. 24, 2004
Sung-ho Kang, Osan-si, KR;
Sung-wook Jung, Suwon-si, KR;
In-pil Cha, Osan-si, KR;
Cheol-kyu Yang, Osan-si, KR;
Sung-Ho Kang, Osan-si, KR;
Sung-Wook Jung, Suwon-si, KR;
In-Pil Cha, Osan-si, KR;
Cheol-Kyu Yang, Osan-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A mass flow controller includes a base having a passage that allows a fluid to pass through the passage. A first control valve controls a mass flow of a fluid passing through the passage. A second control valve controls a full scale of the mass flow of the fluid. A bypass portion is disposed in the passage through which the fluid passes. A mass flow sensor measures the mass flow of the fluid passing through the bypass portion. The second control valve is connected to the passage adjacent to the bypass portion for controlling the full scale of the mass flow of the fluid passing through the bypass portion.