The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2006
Filed:
May. 12, 2004
Applicant:
Young-jong Kim, Ohsan-si, KR;
Inventor:
Young-Jong Kim, Ohsan-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 9/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for measuring a horizontal level of a wafer chuck, including a measuring part for contacting the wafer chuck to measure a horizontal level, a mounting part on which the measuring part is mounted, and a supporting part for supporting the mounting part. The measuring part may include a center gage and a plurality of edge gages.