The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2006
Filed:
Dec. 08, 2003
Taku Hirasawa, Kyoto, JP;
Akiko Murata, Osaka, JP;
Eiji Fujii, Osaka, JP;
Hideo Torii, Osaka, JP;
Tohru Nakagawa, Shiga, JP;
Taku Hirasawa, Kyoto, JP;
Akiko Murata, Osaka, JP;
Eiji Fujii, Osaka, JP;
Hideo Torii, Osaka, JP;
Tohru Nakagawa, Shiga, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
First, a first electrode layer, a piezoelectric layer, a second electrode layerand an oscillation layerare stacked in this order over one surface of a silicon substrate. Next, an ink chamber partitionand a nozzle plateare stacked over the oscillation layer. Subsequently, the silicon substrateis ground away to a predetermined thickness from a surface thereof opposite to the first electrode layer, and then a remnant silicon substrateis dry etched away. Thereafter, the first electrode layeris patterned to form a plurality of inkjet mechanisms, . . . . Finally, the plurality of inkjet mechanisms, . . . are divided to simultaneously fabricate a plurality of inkjet heads