The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2006
Filed:
Feb. 07, 2003
Kay Hellig, Dresden, DE;
Peter Goerigk, Dresden, DE;
Uwe Liebold, Kleinroehrsdorf, DE;
Ronald Gruenz, Dresden, DE;
Karl-heinz Fandrey, Dresden, DE;
Kay Hellig, Dresden, DE;
Peter Goerigk, Dresden, DE;
Uwe Liebold, Kleinroehrsdorf, DE;
Ronald Gruenz, Dresden, DE;
Karl-Heinz Fandrey, Dresden, DE;
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
In a production line, a cluster tool having a plurality of substantially identical process modules and a metrology tool includes a control unit that allows one to receive, store and process information that indicates in which process module which substrates have been processed and which selects, on the basis of the process information, which substrate has to be subjected to a measurement. Advantageously, the substrates are selected so that each process module is represented by a corresponding substrate to be measured in order to reliably monitor the process quality of each process module.