The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2006
Filed:
Feb. 16, 2005
Akihiro Murata, Suwa, JP;
Akihiro Murata, Suwa, JP;
Seiko Epson Corporation, , JP;
Abstract
Provided is an optical modulator capable of forming an optical gap easily and accurately without having to perform underetching to the sacrifice layer. An optical modulator includes a first substrate provided with a first concave portion in which the bottom part becomes a moving part, and a movable reflection film being formed on the moving part; and a second substrate provided with a second concave portion having a diameter that is smaller than the diameter of the first concave portion at a position facing the first concave portion, and a fixed reflection film being formed on the bottom part of the second concave portion; wherein the depth of the first concave portion prescribes the movable range of the movable reflection film, and an optical gap is prescribed based on the spacing between movable reflection film and the fixed reflection film.