The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2006
Filed:
Dec. 22, 2005
Applicants:
Tomoko Ohtsuki, Macungie, PA (US);
Soichi Owa, Tokyo, JP;
Inventors:
Tomoko Ohtsuki, Macungie, PA (US);
Soichi Owa, Tokyo, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/37 (2006.01); G02F 1/35 (2006.01); H01S 3/109 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of irradiating ultraviolet light onto an object. The method includes generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion, amplifying the pulse light plural times with an optical amplifier that includes a plurality of fiber optical amplifiers, wavelength-converting the amplified pulse light into ultraviolet light with a wavelength converting portion that includes a plurality of non-linear optical crystals, and irradiating the ultraviolet light onto the object through an optical system.