The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2006

Filed:

Aug. 03, 2005
Applicants:

Michael L. Anderson, San Jose, CA (US);

Edward A. Mccloud, Castro Valley, CA (US);

Shahriar Mostarshed, San Mateo, CA (US);

Michael A. Casolo, Oakland, CA (US);

Inventors:

Michael L. Anderson, San Jose, CA (US);

Edward A. McCloud, Castro Valley, CA (US);

Shahriar Mostarshed, San Mateo, CA (US);

Michael A. Casolo, Oakland, CA (US);

Assignee:

Qualitau, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A probe card is vertically mounted generally perpendicular to a wafer undergoing life tests in a heated environment to limit exposure of the probe card to heat from the wafer chuck. The probe card and probe head assembly are mounted on a support rail which has one or more channels for the flow of cool air to a probe head assembly and the probe card, while it shields the flex cable from the hot chuck. The cool air flow disrupts convective hot air flow upwards from the heated chuck to the probe card and probe head and facilitates cooling of the probe card and probe head.


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