The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2006
Filed:
Apr. 19, 2001
Takafumi Yamato, Settsu, JP;
Katsuhiko Higashino, Settsu, JP;
Hiroyuki Tanaka, Settsu, JP;
Tsuyoshi Noguchi, Settsu, JP;
Mitsuru Kishine, Settsu, JP;
Takafumi Yamato, Settsu, JP;
Katsuhiko Higashino, Settsu, JP;
Hiroyuki Tanaka, Settsu, JP;
Tsuyoshi Noguchi, Settsu, JP;
Mitsuru Kishine, Settsu, JP;
Daikin Industries, Ltd., Osaka, JP;
Abstract
There is provided a fluorine-containing elastomer molded article which is obtained by irradiating the fluorine-containing elastomer molded article with a plasma and has a center line average roughness of not less than 0.65 μm or a fluorine-containing elastomer molded article which is obtained by applying a resin coating layer on a fluorine-containing elastomer substrate, has a small peeling strength and a small etching rate at the irradiation of plasma and is excellent in detachability and whiteness. There is provided particularly a molded article suitable as various sealing materials for semiconductor production apparatuses.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile