The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2006

Filed:

Oct. 03, 2003
Applicants:

Yoshiyuki Nakamizo, Toyama, JP;

Tsutomu Sawai, Toyama, JP;

Masato Ando, Toyama, JP;

Inventors:

Yoshiyuki Nakamizo, Toyama, JP;

Tsutomu Sawai, Toyama, JP;

Masato Ando, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides a semiconductor acceleration sensor wherein a semiconductor element is prevented from being damaged even when at least part of a weight is disposed in an internal space of a semiconductor sensor element and the mass of a weight is accordingly increased. An inner peripheral surface of a support portionis constituted by four trapezoidal inclined surfacesof a substantially identical shape which are annularly combined so as to define an outer peripheral surface of a frust-pyramidal space. A weightis so constructed as to have an abutting portion including a linear portionwhich abuts against the inclined surfacesconstituting the inner peripheral surface of the support portionwhen the weightmakes a maximum displacement in a direction where a diaphragm portionis located. The abutting portionhas a circular outline shape as seen from a side where a weight fixing portionis located. A stopper structure is constituted by the inclined surfacesand the abutting portionof the weight, for restricting a displacement range of the weightin the direction where the diaphragm portionis located.


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