The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Jun. 30, 2004
Harvey C. Nathanson, Pittsburgh, PA (US);
Robert S. Howell, Silver Spring, MD (US);
Garrett A. Storaska, Reston, VA (US);
John B. Goodell, Baltimore, MD (US);
Stephen D. Vancampen, Clarksville, MD (US);
Harvey C. Nathanson, Pittsburgh, PA (US);
Robert S. Howell, Silver Spring, MD (US);
Garrett A. Storaska, Reston, VA (US);
John B. Goodell, Baltimore, MD (US);
Stephen D. Vancampen, Clarksville, MD (US);
Northrop Gruman Corporation, Los Angeles, CA (US);
Abstract
A micro-electrical mechanical system (MEMS) mirror assembly including an array of micro-mirrors formed on a substrate and having springs on one side and which angularly tilt between ON and OFF states in response to an electrostatic force generated by a voltage applied to an electrode located on the substrate. At least one, but preferably two springs in the form of two thin strips of metal attach to post(s) at the side edge of the mirror and act as springs which provide a restoring force when the mirror is tilted between an OFF state which occurs when the mirror is flat relative to the substrate with no voltage applied, and in the ON state when the mirror is tilted when a voltage is applied.