The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Sep. 17, 2003
Hiroaki Sano, Nakakoma-gun, JP;
Masaru Nagashimada, Nakakoma-gun, JP;
Shinji Ishida, Nakakoma-gun, JP;
Hiroaki Sano, Nakakoma-gun, JP;
Masaru Nagashimada, Nakakoma-gun, JP;
Shinji Ishida, Nakakoma-gun, JP;
Terumo Kabushiki Kaisha, Tokyo, JP;
Abstract
The present invention has a purpose of providing a tube connecting apparatus capable of stably, accurately executing control of wafer temperature even when connecting of tubes is conducted continuously. A tube connecting apparatus () includes a heater () for heating a wafer holder (), a thermister () which detects the temperature of the wafer holder (), a heater heating control device () which controls the heater () based on output of the thermister (), and a wafer heating control device () which performs heating control of a wafer () through constant power control. Before the start of heating the wafer () by the wafer heating control device (), the control of the heater () is performed by the heater heating control device () for temperature control so that the wafer holder () is heated to a fixed temperature (about 65° C.).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile