The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Jan. 08, 2004
Toshiyuki Ohsawa, Yokohama, JP;
Yoichi Takahara, Yokohama, JP;
Toshiki Kaneko, Chiba, JP;
Daisuke Sonoda, Mobara, JP;
Toshiyuki Ohsawa, Yokohama, JP;
Yoichi Takahara, Yokohama, JP;
Toshiki Kaneko, Chiba, JP;
Daisuke Sonoda, Mobara, JP;
Hitachi Displays Ltd., Mobara, JP;
Abstract
Where a thin film formed on a glass substrate is etched with a solution containing a fluoride, insoluble residues formed by the reaction of the solution with glass substrate components adhere to the back of the substrate to cause etching non-uniformity called roller marks. So, a solution is supplied directly to supporting members for supporting the glass substrate, or concentratedly to a region where the substrate and the supporting members come into contact and from a position opposite to the transporting direction of the substrate, or to both the supporting members and regions where the substrate and the supporting members come into contact. This enables the roller marks to be kept from forming, consequently making it possible to improve display quality of display devices.