The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Oct. 17, 2001
Shoji Kamiunten, Tokyo, JP;
Yoshiyuki Ishikura, Tokyo, JP;
Shinichi Ike, Tokyo, JP;
Seiichiro Kinugasa, Tokyo, JP;
Hideyuki Tanaka, Tokyo, JP;
Shoji Kamiunten, Tokyo, JP;
Yoshiyuki Ishikura, Tokyo, JP;
Shinichi Ike, Tokyo, JP;
Seiichiro Kinugasa, Tokyo, JP;
Hideyuki Tanaka, Tokyo, JP;
Yamatake Corporation, Tokyo, JP;
Abstract
A flow sensor () is constituted by a substrate () having a front surface () side facing a channel () for a measurement target fluid (), and a channel forming member () and a plate () disposed oppositely across the substrate (). The substrate () is formed of stainless steel having a thickness of about 50 μm to 150 μm into a plate. An electric insulating film is formed on that surface () of the substrate () which is opposite to the channel () side, and a temperature detection sensor () for measuring the flow velocity (flow rate) of the fluid (), an ambient temperature sensor (), an electrode pad (), and a thin metal film () for wiring are formed on it.