The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Sep. 22, 2004
Tohru Ishizuya, Tokyo, JP;
Junji Suzuki, Hachioji, JP;
Tohru Ishizuya, Tokyo, JP;
Junji Suzuki, Hachioji, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The movable part is constructed from a bridge partwith a cantilever structure in which the fixed end is fastened via a leg partThe bridge parthas two bridge constituent partsandthat are connected in series between the fixed end and the free end. The bridge constituent parton the side of the fixed end is a plate spring part. The bridge constituent parton the side of the free end is a rigid part that possesses rigidity. The bridge constituent partis bent toward the opposite side from the substratein a state in which the bridge partreceives no force. The mirroris disposed on the free end side of the bridge constituent partAs a result, a microactuator can be obtained which can be operated by a small driving force.