The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Sep. 16, 2003
Applicants:
Juan Jose Gonzalez, Fort Collins, CO (US);
Fernando Gustavo Tomasel, Fort Collins, CO (US);
Andrew Shabalin, Fort Collins, CO (US);
Inventors:
Juan Jose Gonzalez, Fort Collins, CO (US);
Fernando Gustavo Tomasel, Fort Collins, CO (US);
Andrew Shabalin, Fort Collins, CO (US);
Assignee:
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/02 (2006.01); C23C 16/00 (2006.01); H01J 7/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
The reaction rate of a feed gas flowed into a plasma chamber is controlled. In one embodiment a pulsed power supply repeatedly applies a high power pulse to the plasma chamber to increase the reaction rate of plasma within the chamber, and applies a low power pulse between applications of the high power pulses.