The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7115168 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 03, 2006

Filed:

May. 03, 2005
Applicants:

Daniel Harrison Grantham, Glastonbury, CT (US);

Thomas Samuel Phely-bobin, Marlborough, MA (US);

Fotios Papadimitrakopoulos, Vernon, CT (US);

Faquir C. Jain, Storrs, CT (US);

Inventors:

Daniel Harrison Grantham, Glastonbury, CT (US);

Thomas Samuel Phely-Bobin, Marlborough, MA (US);

Fotios Papadimitrakopoulos, Vernon, CT (US);

Faquir C. Jain, Storrs, CT (US);

Assignee:

Optoelectronic Systems, Storrs, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

Scanning localized evaporation and deposition of an evaporant on a substrate utilizes a mask assembly comprised of a series of mask elements with openings thereon and spaced apart in a stack. The openings are aligned so as to direct the evaporant therethrough onto the substrate. The mask elements are heated and the stack may include a movable shutter element to block openings in adjacent mask elements. The evaporant streams are usually vertical but some may be oblique to the substrate, and they may be of different materials.


Find Patent Forward Citations

Grantham, Daniel. (2006). Patterned thin-film deposition using collimating heated masked assembly (U.S. Patent No. 7115168). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7115168

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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