The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2006

Filed:

Jul. 28, 2004
Applicants:

Tatsuya Honda, Isehara, JP;

Etsuko Asano, Atsugi, JP;

Inventors:

Tatsuya Honda, Isehara, JP;

Etsuko Asano, Atsugi, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2006.01); G01R 19/00 (2006.01); G01R 25/00 (2006.01); G01R 27/28 (2006.01); G06F 17/50 (2006.01); G06F 9/45 (2006.01);
U.S. Cl.
CPC ...
Abstract

It is an object of the present invention to provide a method for evaluating a semiconductor device including a semiconductor, an insulator, and a conductor. The present invention has a first step of applying a voltage to a conductor to measure a current value, a second step of dividing the current value by an area of a region in which a semiconductor is overlapped with the conductor to calculate a current density Jg, and a third step of calculating a depletion layer edge leakage current and an in-plane leakage current by using coefficients of a formula Jg=2A/r+B (A and B are respectively constants) that has a reciprocal of the radius r and the current density Jg. Alternatively, the present invention has the first step, the second step, and another third step of using coefficients of a formula Jg=A/W+B/L+C (A, B, and C are respectively constants) that has reciprocals of a channel width W and a channel length L of the semiconductor and the current density Jg to calculate a depletion layer edge leakage current, an in-plane leakage current, and a silicon edge leakage current.


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