The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2006
Filed:
Jul. 29, 2004
Daniel Charles Kerr, Orlando, FL (US);
Alan R. Olds, Clermont, FL (US);
Bradley Curtis Deselms, Longwood, FL (US);
Dennis P. Biondi, Cocoa, FL (US);
William A. Russell, Orlando, FL (US);
Daniel Charles Kerr, Orlando, FL (US);
Alan R. Olds, Clermont, FL (US);
Bradley Curtis Deselms, Longwood, FL (US);
Dennis P. Biondi, Cocoa, FL (US);
William A. Russell, Orlando, FL (US);
Agere Systems, Inc., Allentown, PA (US);
Abstract
Apparatus and method are provided for in-situ measurement of vibrational energy applied to a wafer in a process bath of a vibrational cleaning system. The apparatus may be made up of a test wafer comprising an array of pressure sensing elements disposed thereon for monitoring power level variation of a time-varying pressure wave. The time-varying pressure wave is indicative of vibrational energy that would be applied to a wafer in the process bath in the position of the test wafer.