The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2006
Filed:
Feb. 25, 2002
Tamirisa V. V. R. Apparao, Fremont, CA (US);
Oleg Podtcherniaev, Moscow Region, RU;
Kevin P. Flynn, Novato, CA (US);
Paul Hall, San Jose, CA (US);
Roger Lachenbruch, Los Altos Hills, CA (US);
Mikhail Boiarski, Macungie, PA (US);
Tamirisa V. V. R. Apparao, Fremont, CA (US);
Oleg Podtcherniaev, Moscow Region, RU;
Kevin P. Flynn, Novato, CA (US);
Paul Hall, San Jose, CA (US);
Roger Lachenbruch, Los Altos Hills, CA (US);
Mikhail Boiarski, Macungie, PA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
Disclosed is an ultra-low temperature, dual-compressor (), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system () in combination with a closed-loop gas secondary refrigeration loop (). The ultra-low temperature, dual-compressor (), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object (), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.