The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Jan. 13, 2004
Koji Suzuki, Mihama-ku, JP;
Koji Suzuki, Mihama-ku, JP;
Kawasaki Microelectronics, Inc., Mihama-ku, JP;
Abstract
Manufacturing equipment performs different processes, including a first process that produces a reaction products and a second process that removes the reaction products, in a same chamber. The amount of reaction products in the chamber is monitored, and a priority order between the first and the second processes is set based on the monitored amount of the reaction products. The order of the first and the second processes is determined based on the set priority order. The amount of reaction products can be kept within an acceptable range without performing a long-period lot-to-lot cleaning, and a high manufacturing efficiency is realized.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile