The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Dec. 23, 2002
Ralf Strümpler, Erding, DE;
Ralf Strümpler, Erding, DE;
ABB Research LTD, Zurich, CH;
Abstract
A micro-electromechanical system comprises a substrate (S) and at least two micro-elements () of which a first is bistably switchable. The micro-elements () have faces () facing one another, which are produced by a structuring method and thereby initially have at least one minimal distance from one another characteristic of the structuring method. The first micro-element () is then switched to the other stable state (B) whereby the distance between the faces () facing one another is smaller than the characteristic minimal distance for the structuring method. The micro-electromechanical system can be constructed as an electrostatically actuatable microswitch with improved switchability. Laterally and horizontally operating micro-electromechanical systems with new functionality and current-free closed relays can be implemented.