The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2006

Filed:

Mar. 04, 2004
Applicants:

Hisashi Fujimura, Chino, JP;

Shuji Tanaka, Chino, JP;

Yoshitake Kobayashi, Shiojiri, JP;

Inventors:

Hisashi Fujimura, Chino, JP;

Shuji Tanaka, Chino, JP;

Yoshitake Kobayashi, Shiojiri, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 37/00 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
Abstract

An intermediate product transferring apparatus is provided for transferring an intermediate product W between a single-wafer carrying line for carrying the intermediate product W in a single-wafer manner and a manufacturing apparatus for manufacturing the intermediate product W includes a transferring robot for transferring the intermediate product W between the single-wafer carrying line and the manufacturing apparatus; and a buffer for temporarily storing the intermediate product W which is transferred from the single-wafer carrying line by the transferring robot or the intermediate product W which is processed by the manufacturing apparatus.


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