The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Nov. 03, 2005
Kazuhiko Kano, Toyoake, JP;
Tetsuo Yoshioka, Okazaki, JP;
Takao Iwaki, Obu, JP;
Yukihiro Takeuchi, Nishikamo-gun, JP;
Kazuhiko Kano, Toyoake, JP;
Tetsuo Yoshioka, Okazaki, JP;
Takao Iwaki, Obu, JP;
Yukihiro Takeuchi, Nishikamo-gun, JP;
Denso Corporation, Kariya, JP;
Abstract
A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.