The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Sep. 21, 2004
Akihiro Murata, Hokuto, JP;
Ryosuke Nakamura, Chino, JP;
Shinichi Kamisuki, Shiojiri, JP;
Seiko Epson Corporation, , JP;
Abstract
An optical tunable filter includes a first substratehaving a light transmitting property which includes a movable portion, a second substratehaving a light transmitting property which is provided so as to be opposed to the first substrate, a first gapand a second gapwhich are respectively provided between the movable portionand the second substrate, an interference portion which causes interference of incident light between the movable portionand the second substratethrough the second gap, and a driving portion which changes a distance of the second gapby displacing the movable portionwith respect to the second substrateusing the first gap. This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.