The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
May. 18, 2005
Applicant:
Kenji Okada, Ibaraki, JP;
Inventor:
Kenji Okada, Ibaraki, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
Gate voltage sweeping is performed on a semiconductor element using a multilayer insulating film including a lower insulating film whose thickness is to be obtained. A low voltage peak current mode is extracted from the resultant current-voltage characteristic, so that a peak voltage and a peak current amount in this mode are obtained. The thickness of the lower insulating film is obtained based on the obtained peak voltage or peak current amount and a previously-obtained correlation between the peak voltage or peak current amount and the thickness of the lower insulating film.