The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Sep. 26, 2001
Applicants:
Mark J. Beck, Los Gatos, CA (US);
Richard B. Vennerbeck, Los Gatos, CA (US);
Inventors:
Mark J. Beck, Los Gatos, CA (US);
Richard B. Vennerbeck, Los Gatos, CA (US);
Assignee:
Product Systems Incorporated, Campbell, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 2/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A transducer comprised of a resonator and a piezoelectric crystal for cleaning single items such as semiconductor wafers and flat panel displays. The resonator is an elongated piece of material having a cross section that is trapezoidal in shape. The parallel sides of the trapezoid form the top and bottom ends of the resonator and the nonparallel sides of the trapezoid focus the acoustic energy on the bottom end of the resonator.