The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Jun. 20, 2003
Richard Naylor-smith, West Sussex, GB;
Simon Frederick Dillon, Surrey, GB;
Richard Cooke, Worthing, GB;
Richard Naylor-Smith, West Sussex, GB;
Simon Frederick Dillon, Surrey, GB;
Richard Cooke, Worthing, GB;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An end station for an ion implanter has a vacuum chamber which receives an ion beam. A wafer holder is mounted at the distal end of a scanning arm which has its proximal end attached to the chamber wall. The scanning arm has at least two rotary joints providing articulation of the arm to permit movement of the wafer holder in two orthogonal scan directions in a scan plane transverse to the beam path through the vacuum chamber. A scanning arm driver moves the substrate holder in the scan plane in a desired two-dimensional scan pattern relative to the beam path.