The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Mar. 01, 2004
Sang Ouk Ryu, Daejeon-Shi, KR;
Seong Mok Cho, Daejeon-Shi, KR;
Kwi Dong Kim, Daeeon-Shi, KR;
Byoung Gon Yu, Daejon-Shi, KR;
Sang Ouk Ryu, Daejeon-Shi, KR;
Seong Mok Cho, Daejeon-Shi, KR;
Kwi Dong Kim, Daeeon-Shi, KR;
Byoung Gon Yu, Daejon-Shi, KR;
Electronics and Telecommunications Research Institute, Daejeon-Shi, KR;
Abstract
The present invention relates to a pyroelectric infrared ray sensor fabricated by using MEMS processes, wherein an infrared ray absorption layer disposed on the most top portion of the infrared ray sensor assembly is formed with a silicon oxide film (SiO) to exhibit an excellent absorption efficiency with respect to the infrared wavelength band of 8 to 12 mm and function as a protective film for a sensor pixel. In addition, an infrared ray absorption layer, support arms and posts are formed in a single body to allow the sensor assembly to be robust and fabricating processes to be remarkably reduced to increase a process yield.