The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7105418 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 12, 2006

Filed:

Nov. 24, 2004
Applicant:

Heung-jin Joo, Suwon-Si, KR;

Inventor:

Heung-Jin Joo, Suwon-Si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

For forming stacked capacitors, an opening is formed through at least one semiconductor material. A lower electrode material is patterned within the opening to form a plurality of lower electrodes within the opening. The stacked capacitors are formed with the lower electrodes within the opening by depositing a capacitor dielectric and an upper electrode within the opening. With such a relatively large opening, a capacitor dielectric of the stacked capacitors is deposited with a large thickness for improving reliability of the stacked capacitors.


Find Patent Forward Citations

Joo, Heung-Jin. (2006). Multiple stacked capacitors formed within an opening with thick capacitor dielectric (U.S. Patent No. 7105418). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7105418

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