The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Mar. 18, 2004
Takeo Tsukamoto, Kanagawa, JP;
Shinichi Kawate, Kanagawa, JP;
Kazunari Oyama, Kanagawa, JP;
Takahiro Sato, Kanagawa, JP;
Shin Kitamura, Kanagawa, JP;
Kazuya Miyazaki, Kanagawa, JP;
Takashi Iwaki, Tokyo, JP;
Akira Shimazu, Kanagawa, JP;
Takeo Tsukamoto, Kanagawa, JP;
Shinichi Kawate, Kanagawa, JP;
Kazunari Oyama, Kanagawa, JP;
Takahiro Sato, Kanagawa, JP;
Shin Kitamura, Kanagawa, JP;
Kazuya Miyazaki, Kanagawa, JP;
Takashi Iwaki, Tokyo, JP;
Akira Shimazu, Kanagawa, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In a method for manufacturing carbon fibers by means of a thermal CVD method through catalysts, the method capable of obtaining a uniform film thickness regardless of a growth position and a growth area on a substrate is provided. The substrate on which a catalyst layer is formed is disposed in a reaction container. An atmosphere in the reaction container is set to be a reduced pressure atmosphere including a carbon containing gas having a partial pressure of 10 Pa or less, and the substrate is heated in the atmosphere to grow carbon fibers on the catalyst layer.