The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
Aug. 07, 2001
Thomas Hartmann, Uffing am Staffelsee, DE;
Gerhard Doering, Schloeben, DE;
Thomas Hartmann, Uffing am Staffelsee, DE;
Gerhard Doering, Schloeben, DE;
Carl Zeiss Jena GmbH, Jena, DE;
Abstract
In a method for electronic image rectification in pixel-by-pixel scanning of a substrate by a bundled electromagnetic beam, the pixels are read out one after the other in readout intervals of constant predetermined duration. In order to improve image quality, the deviation between a reference scanning movement and an actual scanning movement carried out on the reference substrate is initially determined in a calibration process, for example, by a reference substrate with a known geometric surface structure. Depending on this deviation, a delay interval is determined for a pixel and the start of the readout interval of this pixel or of the subsequent pixel is delayed by this delay interval. The information about the delay interval is stored. In an analysis process for examining a substrate, the stored information about the delay interval is accessed for the pixel, and the delay interval is added before or after the readout interval.