The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
Jul. 29, 2004
Takahiro Miura, Aichi, JP;
Satoshi Imaizumi, Aichi, JP;
Takahiro Miura, Aichi, JP;
Satoshi Imaizumi, Aichi, JP;
Nidek Co., Ltd., Aichi, JP;
Abstract
A surface inspection apparatus for inspecting a surface of an object to be inspected, includes: a projecting optical system which projects an inspection light to the object surface via a reference surface; a pick up unit which picks up surface interference fringes formed by reflected light from the reference surface and reflected light from the object surface; and an arithmetic unit which calculates a shape of the surface of the object based on the picked up interference fringes. The projecting optical system includes a laser light source that emits, as the inspection light, pulsed laser light having a pulse width and a pulse quiescent time capable of preventing formation of rear face interference fringes which are formed by the reflected light from the object surface and reflected light caused by the inspection light being reflected from its rear face, the object allowing the inspection light to pass therethrough.