The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
May. 06, 2004
Harvey C. Nathanson, Pittsburgh, PA (US);
Christopher Kirby, Gambrills, MD (US);
Robert Tranchini, Ellicott City, MD (US);
Robert M. Young, Ellicott City, MD (US);
Harvey C. Nathanson, Pittsburgh, PA (US);
Christopher Kirby, Gambrills, MD (US);
Robert Tranchini, Ellicott City, MD (US);
Robert M. Young, Ellicott City, MD (US);
Northrop Grumman Corporation, Los Angeles, CA (US);
Abstract
A MEMS device having a support frame positioned on a substrate surrounding a first electrode. A rigid flange portion at the top of the support frame is closely space from, and is connected to, a second electrode by relatively short spring members. RF conductors connected to respective first and second electrodes complete an RF switch. A dielectric layer on the first electrode forms a capacitive type device and includes an electrostatic shield layer on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance.