The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2006

Filed:

Nov. 01, 2002
Applicants:

Masami Ishihara, Kawagoe, JP;

Tsuneaki Maesawa, Kawagoe, JP;

Yoji Urano, Kawagoe, JP;

Inventors:

Masami Ishihara, Kawagoe, JP;

Tsuneaki Maesawa, Kawagoe, JP;

Yoji Urano, Kawagoe, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F 2/50 (2006.01); G03F 7/04 (2006.01); C03C 381/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention relates to a hybrid type onium salt having an iodonium salt and a sulfonium salt in the molecule, Useful, for example, as a cationic type photopolymerization initiator and an acid generator for a chemically amplified resist and provides a hybrid type onium salt shown by the general formula [1]: and Ris an alkyl group, an alkenyl group, an aryl group or an aralkyl group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted or a group shown by the general formula [2]: and a polymerization initiator or an acid generator, comprising said onium salt.


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