The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2006

Filed:

Nov. 20, 2002
Applicant:

Frédéric Lanois, Tours, FR;

Inventor:

Frédéric Lanois, Tours, FR;

Assignee:

STMicroelectronics S.A., Montrouge, FR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for manufacturing a vertical Schottky diode with a guard ring on a lightly-doped N-type silicon carbide layer, including forming a P-type epitaxial layer on the N-type layer; implanting N-type dopants in areas of the P-type epitaxial layer to neutralize in these areas, across the entire thickness of the epitaxial layer, the P-type dopants to form N-type regions, of dopant concentration lower than that of the epitaxial layer, and delimiting a P-type guard ring; forming on the external periphery of the component an insulating layer partially covering the guard ring; and forming a Schottky contact with the N-type region internal to the guard ring.


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