The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
Sep. 24, 2005
Pil-kwon Jun, Yongin-si, KR;
Sang-oh Park, Seongnam-si, KR;
Yong-kyun Ko, Osan-si, KR;
Hun-jung Yi, Suwon-si, KR;
Pil-Kwon Jun, Yongin-si, KR;
Sang-oh Park, Seongnam-si, KR;
Yong-Kyun Ko, Osan-si, KR;
Hun-Jung Yi, Suwon-si, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A wafer guide includes a horizontal support panel and at least three vertical panels attached on one surface of the support panel. Each of the vertical panels has a vertical body panel and a plurality of protrusions upwardly extended from a top surface of the vertical body panel. Gap regions between the protrusions act as slots for holding wafers. Sidewalls of the slots have a convex shaped profile when viewed from a top view, and bottom surfaces of the slots also have a convex shaped profile when viewed from a cross sectional view that crosses the vertical panels.