The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2006

Filed:

Mar. 21, 2002
Applicants:

Takeshi Fujii, Kanagawa, JP;

Yoji Okazaki, Kanagawa, JP;

Mitsuru Sawano, Kanagawa, JP;

Kazuhiko Nagano, Kanagawa, JP;

Inventors:

Takeshi Fujii, Kanagawa, JP;

Yoji Okazaki, Kanagawa, JP;

Mitsuru Sawano, Kanagawa, JP;

Kazuhiko Nagano, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/72 (2006.01); G06F 3/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

An inexpensive and highly productive exposure device for directly scanning and exposing a photosensitive material sensitive to at least a UV region, based on digital data. As a motor controller moves an exposure head at a fixed speed in Y direction, image data is read one line of image data, each GLV element of a light modulator array is switched on/off by the read image data, and laser light from a high power light source of the exposure head is switched on/off. A UV-sensitive object to be exposed is exposed in X direction in a number of pixel units that substantially corresponds to the number of the GLV elements. The image data is scanned and exposed by one line in Y direction (main-scan). The motor controller moves a flat stage by one step in X direction (sub-scan). The object to be exposed is imagewise-exposed by repeating such scans.


Find Patent Forward Citations

Loading…