The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2006
Filed:
Aug. 22, 2003
Victor A. Lifton, Bridgewater, NJ (US);
Anatoli Olkhovets, Murray Hill, NJ (US);
Victor A. Lifton, Bridgewater, NJ (US);
Anatoli Olkhovets, Murray Hill, NJ (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
In an electrostatic driving structure for a MEMS device or other electrostatically-driven device, non-insulating material is disposed on or adjacent a gap on the surface of a dielectric between adjacent electrodes and is electrically coupled to a source of potential, so as to form an electrostatic shield which reduces the effect of mobile charges in the dielectric gap on the forces generated by the electrostatic driving structure. The shield is made of non-insulating material and may, for example, be formed by plating of metal or epitaxial deposition of silicon onto the electrode.