The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7098467 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 29, 2006

Filed:

Nov. 23, 2004
Applicant:

Takayuki Hasegawa, Tokyo, JP;

Inventor:

Takayuki Hasegawa, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A61N 5/00 (2006.01); G21G 5/00 (2006.01); G01B 9/00 (2006.01); G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A measuring apparatus for irradiating measuring light and for measuring optical performance of a target optical system includes a barrel for housing the target optical system, the barrel being rotatable around an optical axis of the target optical system, and an illumination optical system for introducing the measuring light into the barrel, the illumination optical system being movable along a direction perpendicular to the optical axis of the target optical system, wherein the measuring apparatus controls an illumination area of the measuring light in the target optical system using a polar coordinate determined by a rotational angle of the barrel and a moving amount of the illumination optical system.


Find Patent Forward Citations

Hasegawa, Takayuki. (2006). Measuring method and apparatus, exposure method and apparatus, and device manufacturing method (U.S. Patent No. 7098467). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7098467

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