The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2006
Filed:
Jan. 26, 2005
Brent Elliot, Cupertino, CA (US);
Frank Balma, Monte Sereno, CA (US);
Alexander Veytser, Mountain View, CA (US);
Benjamin Mosser, San Diego, CA (US);
Harold H. Mortensen, Carlsbad, CA (US);
Brent Elliot, Cupertino, CA (US);
Frank Balma, Monte Sereno, CA (US);
Alexander Veytser, Mountain View, CA (US);
Benjamin Mosser, San Diego, CA (US);
Harold H. Mortensen, Carlsbad, CA (US);
Other;
Abstract
A susceptor including a substrate support and a conductor is provided. The substrate support includes a conductive element, a contact bonded to the conductive element, and a bushing. The conductor is disposed through the bushing and is bonded to the contact. The substrate support can also include a conductive spreader between the contact and the conductive element. A method for fabricating a susceptor is also provided. The method comprises forming a plate including a bushing preform, sintering or hot-pressing a conductive element and a contact between a ceramic layer and the plate to produce a substrate support, forming a conductor opening into the substrate support and through the bushing preform to the contact, and bonding a conductor into the conductor opening.